Effect of Residual Stress of Different Materials on Performance of Chevron Beam Actuator

Authors

  • Neha Jaina Department of Electronics and Communication Engineering, SDDIET, Barwala, Panchkula, India. Author
  • Dinesh Arora Department of Electronics and Communication Engineering, SDDIET, Barwala, Panchkula, India. Author
  • Sandeep Kumara Department of Electronics and Communication Engineering, SDDIET, Barwala, Panchkula, India. Author

Keywords:

MEMS, Actuators, Electrothermal, Chevron, Residual Stress.

Abstract

This paper reports the effect of residual stress of different materials on displacement of the actuator. This study has been done by designing and simulating the microactuator using COMSOL Multiphysics 4.2a. The behaviour of the microactuator is studied for different materials like polysilicon, gold, nickel, copper and argentum at an applied potential difference of 4V between the contact pads.

References

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Published

2013-03-31

Issue

Vol.3, No.1 (Jan/Mar 2013)

Section

Articles

How to Cite

Effect of Residual Stress of Different Materials on Performance of Chevron Beam Actuator. (2013). International Journal of Current Engineering and Technology, 3(1), 43-45. https://ijcet.evegenis.org/index.php/ijcet/article/view/95