Design and Simulation of MEMS Based Piezoelectric Accelerometers

Authors

  • S. Sai Krishna Electronics and Instrumentation Engineering, LBRCE, Mylavaram, Andhra Pradesh, India Author
  • N.V.S. Ayyappa Sai Electronics and Instrumentation Engineering, LBRCE, Mylavaram, Andhra Pradesh, India Author
  • S. Bhavya Electronics and Communication Engineering, DMSSVHCE, Machilipatnam, Andhra Pradesh, India Author
  • K. Srinivasa Rao Electronics and Instrumentation Engineering, LBRCE, Mylavaram, Andhra Pradesh, India Author

Keywords:

Accelerometer, Piezoelectric, Piezoelectric lead zirconate titanata (PZT)

Abstract

MEMS Accelerometer, the new inventions which revolutionized the technical world. Now, it's time for the self assistive accelerometers. In this paper, we have designed the trampoline, annular diaphragm structured piezoelectric accelerometers using PZT-5H with COMSOL Multiphysics software tool for providing low transverse sensitivity along one axis and good temperature stability. These accelerometers are incorporated into application specific integration circuit (ASIC) and RF telemetry systems to facilitate wireless monitoring of industrial equipment.

References

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Published

2014-04-30

Issue

Special Issue-3 (Apr 2014)

Section

Articles

How to Cite

Design and Simulation of MEMS Based Piezoelectric Accelerometers. (2014). International Journal of Current Engineering and Technology, 1(3.Special Issue), 141-147. https://ijcet.evegenis.org/index.php/ijcet/article/view/3889