Optical Properties of CNT Arrays Growth in Porous Anodic Alumina Templates

Abstract

The synthesized ordered carbon nanotube (CNT) arrays in porous anodic alumina (PAA) matrix, and have characterized their total optical reflectance and bi-directional reflectance distribution function after each processing step of the microwave plasma chemical vapor deposition process (MPCVD). For a PAA sample without CNT growth, the reflectance shows an oscillating pattern with wavelength that agrees reasonably with a multilayer model. During the MPCVD process, heating the sample significantly reduces the reflectance by 30-40%, the plasma treatment reduces the reflectance by another 5-10%, and the CNT growth further reduces the reflectance by 2-3%. After an atomic layer deposition (ALD) process, the reflectance increases to the embedded CNT arrays. After etching and exposure of CNT tips, the reflectance almost returns to the original pattern with slightly higher reflectance. Bi-directional reflectance distribution function (BRDF) measurements show that the CNT-PAA surface is quite specular as indicated by a large lobe at the specular angle, while the secondary lobe can be attributed to surface roughness.