Modelling of Different MEMS Pressure Sensors using COMSOL Multiphysics

Authors

  • Lokesh Singh Panwar Dept of Electronics and Communication, Graphic Era University, Dehradun, India Author
  • Varij panwar Dept of Electronics and Communication, Graphic Era University, Dehradun, India Author
  • Sachin Kala Dept of Electronics and Communication, Graphic Era University, Dehradun, India Author
  • Sushant Sharma Dept of Electronics and Communication, Graphic Era University, Dehradun, India Author

Keywords:

Pressure sensors, capacitive pressure sensors, piezoresistive pressure sensors, piezoelectric pressure sensors, MEMS

Abstract

This paper presents the basic introduction of MEMS pressure sensors. The different types of pressure and its operating principles also included. MEMS pressure sensors have widely used in automotive, biomedical and industrial applications. The design and simulation of different pressure sensors such as capacitive, piezoelectric and piezoresistive MEMS pressure sensors are also proposed in this paper. The COMSOL Multiphysics software is used for the designing and simulation of different MEMS Pressure sensors.

References

Downloads

Published

2017-02-28

Issue

Vol. 7 No. 1 (2017)

Section

Articles

How to Cite

Modelling of Different MEMS Pressure Sensors using COMSOL Multiphysics. (2017). International Journal of Current Engineering and Technology, 7(1), 243-247. https://ijcet.evegenis.org/index.php/ijcet/article/view/2092