Modelling and Computational Analysis of Piezoelectric Micro-cantilever based Switch

Abstract

In this paper, study about the Piezoelectric MEMS (Micro-Electro-Mechanical Systems) cantilever as an A.C switch has been carried out. It presents the modeling and designing of the Piezoelectric Micro-cantilever based switch with pull down electrode. The switch structure is composed of silicon as substrate and aluminum as pull down electrode. The Piezoelectric material used is Lithium Niobate. The amplitude of the minimum voltage required to realize the A.C switch is 2 volts. The simulation of the switch has been carried out using COMSOL, a MEMS modeling and simulation software. The simulation results depend upon the time dependent analysis of the A.C switch.