Modelling of Different MEMS Pressure Sensors using COMSOL Multiphysics. International Journal of Current Engineering and Technology, [S. l.], v. 7, n. 1, p. 243–247, 2017. Disponível em: https://ijcet.evegenis.org/index.php/ijcet/article/view/2092. Acesso em: 13 mar. 2026.